Change of diborane ion species depending on the magnitude of magnetic field using 100 MHz very high frequency discharge

Review of Scientific Instruments

Volumn 71, Issue 2, 2000, Pages 960-962

  Sakai, Shigeki ^a   Takahashi, Masato ^a   Tanjyo, Masayasu ^a  

^a NISSIN ION EQUIPMENT CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013424553     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150358     Document Type: Article

References (2)

1. S. Sakai, M. Takahashi, M. Tanjyo, and K. Matsuda, Mater. Chem. 54, 44 (1998).
2. S. Sakai, M. Takahashi, and M. Tanjyo, Rev. Sci. Instrum., these proceedings.