Normally close microvalve and micropump fabricated on a silicon wafer

Micromechanics and MEMS: Classic and Seminal Papers to 1990

Volumn , Issue , 1997, Pages 444-449

  Esashi, Masayoshi ^a   Shoji, Shuichi ^a   Nakano, Akira ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013398497     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1109/9780470545263.sect8     Document Type: Chapter

References (5)

1. M. Esashi, et.al., "The Fabrication of a Micro Valve by Means of Micromachining", Proc.of the 6th Sensor Symposium, Tukuba, (May,1986), pp269-272.
2. P830-833.
3. S. Shoji, M. Esashi and T. Matsuo, "Prototype Miniature Blood Gas Analyzer Fabricated on a Silicon Wafer", Sensors and Actuators, 14, (1988), pp101-107.
4. W. H. Ko, J.T. Suminto and G.J. Yeh, "Bonding Technique for Microsensors”, Micromachining and Micropackaging of Transducers, Elsevier, Amsterdam (1985), pp41-61.
5. L. S. Fan, Y.C. Chong and R. S. Muller, "Integrated Movable Micromechanical Structures for Sensors and Actuators", IEEE Trans. Electron Devices, 35, (1988), pp724-730.