The ESR investigation of brownish ring at the surface of quartz crucible used for Cz-Si crystal growth

Chemistry Letters

Volumn , Issue 8, 1996, Pages 627-628

  Watanabe, Kohji ^a   Tanaka, Koki ^a   Hasebe, Masami ^a  

^a NIPPON STEEL CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013376130     PISSN: 03667022     EISSN: None     Source Type: Journal    
DOI: 10.1246/cl.1996.627     Document Type: Article

References (8)

1. W. Zulehner and D. Huber, "Crystals 8 Silicon Chemical Etching", Springer-Verlag (1982) Vol.21.
2. K. Ohta, S. Takahashi, H. Horiuchi, and M. Tokonami, The 42th Symp. relating to Appl. Phys. 30p-W-4(1995).
3. R.A. Weeks, J. Appl. Phys., 27, 1376 (1956).
4. C.M. Nelson and R.A. Weeks, J. Am. Cerm. Soc., 43, 396, 399 (1960).
5. D.L. Griscom, E.J. Friebele, and G.H. Sigel Jr., Solid. State Commun., 15, 479 (1974).
6. P.Kaizer, J. Opt. Soc. Am., 64, 475 (1974).
7. Y. Hibino and H. Hanafusa, Jpn. J. Appl. Phys., 22, L766 (1983).
8. Y. Hibino and H. Hanafusa, J. Appl. Phys., 60, 1797 (1986).