Formation of interfacial phases between silica and undoped or antimony-doped silicon melts

Applied Physics Letters

Volumn 64, Issue 17, 1994, Pages 2261-2263

  Huang, Xinming ^a   Terashima, Kazutaka ^a   Anzai, Yutaka ^a   Tokizaki, Eiji ^a   Sasaki, Hitoshi ^a   Kimura, Shigeyuki ^a  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013327621     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.111638     Document Type: Article

References (11)

1. VLSI Science and Technology 1985 PV85-5