Combined scanning tunneling microscopy and infrared spectroscopy study of the interaction of diborane with Si(001)

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1038-1042

  Wang, Yajun ^a   Shan, Jun ^a   Hamers, Robert J ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013231272     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588450     Document Type: Article

References (26)

1. G. Binnig and H. Rohrer, Helv. Phys. Acta 55, 726 (1982).
2. G. Binnig, H. Rohrer, C. Gerber, and E. Weibel, Phys. Rev. Lett. 50, 120 (1983).
3. V. M. Hallmark and S. Chiang, Surf. Sci. 329, 255 (1995).
4. V. M. Hallmark and S. Chiang, Surf. Sci. 286, 190 (1993).
5. V. M. Hallmark, S. Chiang, K.-P. Meinhardt, and K. Hafner, Phys. Rev. Lett. 70, 3740 (1993).
6. X. Chen, E. R. Frank, and R. J. Hamers, Rev. Sci. Instrum. 65, 3373 (1994).
7. X. X. Chen, E. R. Frank, and R. J. Hamers, J. Vac. Sci. Technol. A 12, 2091 (1994).
8. E. R. Frank, X. Chen, and R. J. Hamers, Surf. Sci. 334, L709 (1995).
9. M. J. Bronikowski, Y. Wang, M. T. McEllistrem, D. Chen, and R. J. Hamers, Surf. Sci. 298, 50 (1993).
10. Y. Wang, M. J. Bronikowski, and R. J. Hamers, Surf. Sci. 311, 64 (1994).
11. Y. Wang, M. J. Bronikowski, and R. J. Hamers, J. Phys. Chem. 98, 5966 (1994).
12. Y. J. Chabal and K. Raghavachari, Phys. Rev. Lett. 53, 282 (1984).
13. Y. Chabal, Surf. Sci. Rep. 8, 211 (1988).
14. A. C. Dillon, M. L. Wise, M. B. Robinson, and S. M. George, J. Vac. Sci. Technol. A 13, 1 (1995).
15. A. C. Dillon, M. B. Robinson, M. Y. Han, and S. M. George, J. Electro-chem. Soc. 139, 537 (1992).
16. J. E. Crowell and G. Lu, J. Electron Spectrosc. Relat. Phenom. 54, 1045 (1990).
17. J. Shan, Y. J. Wang, and R. J. Hamers, J. Phys. Chem. (in press).
18. B. S. Meyerson, F. K. LeGoues, T. N. Nguyen, and D. L. Harame, Appl. Phys. Lett. 50, 113 (1987).
19. D. W. Greve, Mater. Sci. Eng. B 18, 22 (1993).
20. M. L. Yu, D. J. Vitkavage, and B. S. Meyerson, J. Vac. Sci. Technol. A 3, 861 (1985).
21. M. L. Yu, D. J. Vitkavage, and B. S. Meyerson, J. Appl. Phys. 59, 4032 (1986).
22. X. Chen, B. Cousins, M. McEllistrem, and R. J. Hamers, Rev. Sci. Instrum. 63, 4308 (1992).
23. Y. Wang, M. J. Bronikowski, and R. J. Hamers, J. Vac. Sci. Technol. A 12, 2051 (1994).
24. Y. Wang, J. Shan, and R. J. Hamers, J. Phys. Chem. (submitted).
25. Y. Wang, R. J. Hamers, and E. Kaxiras, Phys. Rev. Lett. 74, 403 (1995).
26. Y. Wang and R. J. Hamers, J. Vac. Sci. Technol. A 13, 1431 (1995).