Plasma-sheath resonances and energy absorption phenomena in capacitively coupled radio frequency plasmas. Part II. The Herlofson paradox

Journal of Applied Physics

Volumn 84, Issue 12, 1998, Pages 6546-6551

  Ku, Victor P T ^a,b   Annaratone, Beatrice M ^a   Allen, John E ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b VLSI Technology Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013166806     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369026     Document Type: Article

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