Density measurement of thin glass layers for gas barrier films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 4, 1999, Pages 1840-1842

  Fukugami, Norihito ^a   Nishino, Hideo ^a   Yanaka, Masa Aki ^a   Tomiyama, Kozue ^a   Tsukahara, Yusuke ^a  

^a Toppan Technical Research Institute   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK OPENING; DENSITY MEASUREMENTS; DEPOSITION CONDITIONS; FOOD PACKAGING INDUSTRY; GAS BARRIER FILMS; GAS PERMEATION PROPERTIES; GLASS LAYERS; MULTIPLE CRACK; NOVEL METHODS; POLYMER SUBSTRATE; SILICON WAFER SURFACE; THIN GLASS; VOLUMETRIC METHODS;

CHIP SCALE PACKAGES; CRACKS; DENSITOMETERS; DENSITY MEASUREMENT (OPTICAL); DENSITY MEASUREMENT (SPECIFIC GRAVITY); GLASS; GLASS INDUSTRY; POLYMER FILMS; SEMICONDUCTING SILICON COMPOUNDS; SILICON OXIDES; SILICON WAFERS; SUBSTRATES; VACUUM; VACUUM EVAPORATION;

GAS PERMEABLE MEMBRANES;

EID: 0013061744     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581901     Document Type: Conference Paper

References (3)

1. B. M. Henry, A. P. Roberts, C. R. M. Grovenor, A. P. Sutton, G. A. D. Briggs, Y. Tsukahara, T. Miyamoto, M. Yanaka, and R. J. Chater, Proceedings of the 41st Society of Vacuum Coaters Technical Conference, Boston, MA, April, 1998 (unpublished).
2. M. Yanaka, Y. Tsukahara, N. Nakaso, and N. Takeda, J. Mater. Sci. 33, 2111 (1998).
3. Dictionary of Glass, edited by Sumio Sakka (Asakura-shoten, Tokyo, Japan, 1985) (in Japanese).