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Surface and Coatings Technology

Volumn 54-55, Issue , 1992, Pages 315-319

Impurities in ion plated chromium films

(2) Hsieh, J H a Hochman, R F b

a ARGONNE NATIONAL LABORATORY (United States)

b GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013050569 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(09)90068-8 Document Type: Article

Times cited : (3)

References (14)

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2
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3
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5
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- Mattox, D.M.¹

6
- 0019572916
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- Carter, G.¹ Armour, D.G.²

7
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- Correlation between the ion bombardment during film growth of Pd films and their structural and electrical properties
- (1983) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.1 , pp. 512
- Ziemann, P.¹ Kay, E.²

8
- 0001471237
- (1967) J. Appl. Phys. , vol.38 , pp. 3928
- Winters, H.F.¹ Kay, E.²

9
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10
- 0016127457
- (1974) J. Appl. Phys. , vol.54 , pp. 4760
- Winters, H.F.¹ Sigmund, P.²

11
- 0003606901
- R. Behrish, Springer, New York
- (1981) Sputtering by Particle Bombardment I , pp. 59
- Winters, H.F.¹ Sigmund, P.²

12
- 0003088345
- (1989) Surf. Sci. Rep. , vol.10 , pp. 1
- Kasi, S.R.¹ Kang, H.² Sass, C.S.³ Rabalais, J.W.⁴

13
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- (1986) Vacuum , vol.36 , pp. 769
- Armour, D.G.¹ Bailey, P.² Sharpies, G.³

14
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- Modification of niobium film stress by low-energy ion bombardment during deposition
- (1982) Journal of Vacuum Science and Technology , vol.20 , pp. 349
- Cuomo, J.J.¹ Harper, J.M.E.² Guarnieri, C.R.³ Yee, D.S.⁴ Attanasio, L.J.⁵ Angiello, J.⁶ Wu, C.T.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.