Trace element determination of high-purity chemicals for the processing of semiconductors with high-resolution ICP-mass spectrometry using stable Isotope Dilution Analysis (IDA)

Fresenius' Journal of Analytical Chemistry

Volumn 359, Issue 4-5, 1997, Pages 410-413

  Dahmen, J ^a   Pfluger, M ^b   Martin, M ^a   Rottmann, L ^c   Weichbrodt, G ^b  

^a MERCK KGAA   (Germany)

^b FH Aalen Fachbereich Augenoptik   (Germany)

^c Finnigan MAT GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013029444     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160050599     Document Type: Article

References (6)

1. The National Technology Roadmap for Semiconductors (1994) Broschure of Semiconductor Industry Association, San José, CA, USA
2. Pfluger M (1996) Diploma thesis: Implementierung der Isotopenverdünnungsanalyse bei einem hochauflösenden ICP-Massenspektrometer. FH-Aalen
3. Heumann KG (1992) Isotope Dilution Mass Spectrometery (IDMS) of the Elements. Mass Spectrometry Reviews 1992, 11. Wiley p 41-67
4. Heumann KG (1986) Fresenius Z Anal Chem 325 : 661-666
5. Dahmen J, Englert K, Giebenhain G (1996) Internat Lab News, June 1996 : 12-14
6. Feig H, Englert K, Dahmen J (1995) GIT Fachz-Lab 9 : 815-819