Modeling the effects of joint clearances in planar micromechanisms

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 374-377

  Wittwer, Jonathan W ^a   Howell, Larry L ^a   Chase, Kenneth W ^a  

^a Department of Electrical and Computer Engineering   (United States)

Author keywords

Joint clearances; Mechanical error; Precision

Indexed keywords

JOINT CLEARANCES; MECHANICAL ERRORS; PRECISION; VECTOR MODELS;

DEGREES OF FREEDOM (MECHANICS); ERROR ANALYSIS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTIMIZATION; VECTORS;

COMPOSITE MICROMECHANICS;

EID: 0013025996     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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