Design, fabrication, and characterization of single crystal silicon latching snap fasteners for micro assembly

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 57-2, Issue , 1995, Pages 917-923

  Prasad, Rama ^a   Bohringer, Karl Friedrich ^a   MacDonald, Noel C ^a  

^a School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSNAP FASTENERS; SINGLE CRYSTAL SILICON (SCS) TECHNOLOGY;

ACTUATORS; ASSEMBLY; FASTENERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0013020607     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)