Electrical properties and solid-phase reactions in Ni/Si(100) contacts

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 4 B, 2002, Pages 2450-2454

  Tsuchiya, Yoshinori ^a   Tobioka, Akihiro ^a   Nakatsuka, Osamu ^a   Ikeda, Hiroya ^a   Sakai, Akira ^a   Zaima, Shigeaki ^a   Yasuda, Yukio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Contact material; Nickel suicide; NiSi; Shallow junction; Sheet resistance; Specific contact resistivity

Indexed keywords

ELECTRIC PROPERTIES; MORPHOLOGY;

CONTACT MATERIAL; NICKEL SUICIDE; SHALLOW JUNCTIONS; SHEET RESISTANCE; SPECIFIC CONTACT RESISTIVITY;

NICKEL;

EID: 0013017148     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.2450     Document Type: Article

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