A one-dimensional model for a TCP discharge including the collisionless electron heating mechanism

Journal of the Korean Physical Society

Volumn 29, Issue 5, 1996, Pages 678-681

  Kim, S S ^a   Chang, G S ^a,c   Yoon, N S ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Basic Science Institute (KBSI)   (South Korea)

^c NEW YORK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013001863     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

1. M. M. Turner, Phys. Rev. Lett. 71, 1844 (1993).
2. N. S. Yoon, S. S. Kim, C. S. Chang and Duk-In Choi, J. Korean Phys. Soc. 28, 172 (1995).
3. P. L. G. Ventzek, R. J. Hoekstra and M. J. Kushner, J. Vac. Sci. Technol. B 12, 461 (1994).
4. P. L. G. Ventzek, T. J. Sommerer, R. J. Hoekstra and M. J. Kushner, J. Vac. Sci. Technol. B 12, 605 (1994).
5. R. A. Stewart, P. Vitello and D. B. Graves, J. Vac. Sci. Technol. B 12, 478 (1994).
6. A. P. Paranjpe, J. Vac. Sci. Technol. A 12, 1221 (1994).
7. G. DiPeso, V. Vahedi, D. W. Hewett and T. D. Rognlien, J. Vac. Sci. Technol. A 12, 1387 (1994).
8. N. S. Yoon, S. S. Kim, C. S. Chang and Duk-In Choi, Phy. Rev. E 54, 757 (1996).
9. R. B. Piejak, V. A. Godyak and B. M. Alexandrovich, Plasma Sources Sci. Technol. 3, 169 (1994).
10. H. A. Blevin, J. A. Reynolds and P. C. Thonemann, Phys. of Fluids 16, 82 (1973).
11. N. S. Yoon, Nak-Heon Choi, Hyung-Bin Park and Duk-In Choi, IEEE Trans. Plasma Sci. 23, 609 (1995).
12. R. K. Porteous and D. B. Graves, IEEE Trans. Plasma Sci. 19, 204 (1991).
13. V. A. Godyak, Phys. Lett 89A, 80 (1982).
14. V. A. Godyak and N. Sternberg, IEEE Trans. Plasma Sci. 18, 159 (1990).
15. J. Hopwood, C. R. Guarnier, S. J. Whitehair and J. J. Cuomo, J. Vac. Sci. Technol. A 11, 147 (1993).
16. J. Hopwood, C. R. Guarnier, S. J. Whitehair and J. J. Cuomo, J. Vac. Sci. Technol. A 11, 152 (1993).