Fabrication and characterization of a silicon cantilever probe with an integrated quartz-glass (fused-silica) tip for scanning near-field optical microscopy

Applied Optics

Volumn 40, Issue 28, 2001, Pages 5040-5045

  Schürmann, Gregor ^a   Noell, Wilfried ^a   Staufer, Urs ^a   de Rooij, Nico F ^a   Eckert, Rolf ^b   Freyland, Jan M ^b   Heinzelmann, Harry ^b  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; FUSED SILICA; GLASS; IMAGING TECHNIQUES; NEAR FIELD SCANNING OPTICAL MICROSCOPY; QUARTZ; SCANNING;

SILICON CANTILEVERS;

SILICON;

EID: 0012855618     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.005040     Document Type: Article

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