Enhanced x-ray optical contrast of Mo/Si multilayers by H implantation of Si

Journal of Applied Physics

Volumn 80, Issue 4, 1996, Pages 2121-2126

  Schlatmann, R ^a   Keppel, A ^a   Xue, Y ^a   Verhoeven, J ^a   Maree C H M ^b   Habraken, F H P M ^b  

^a FOM INSTITUTE AMOLF   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012763067     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363105     Document Type: Article

References (30)

1. E. Spiller, Soft X-Ray Optical (SPIE Optical Engineering. Bellingham. WA, 1994).
2. R. W. James, The Optical Principles of the Deffraction of X-Rays (Bell. London, 1948).
3. B. Henke, E. M. Gullikson, and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
4. M. J. M. Pruppers. (Ph.D. thesis, University of Utrecht, 1988), Chap. 4.
5. P. John. I. M. Odeh, M. J. K. Thomas, M. J. Tricker, J. I. B. Wilson, J. B. A. England, and D. Newton, J. Phys C 14, 309 (1981).
6. J. F. Sadoc and R. Mosseri, J. Phys C 4, 189 (1981).
7. J. C. Bean, Appl. Phys. Lett. 36, 59 (1980).
8. W. B. Jackson and C. C. Tsai, Phys. Rev. B 45, 6564 (1992).
9. R. Schlatmann, A. Keppel, Y. Xue, and J. Verhoeven, Appl. Phys. Lett 63, 3297 (1993).
10. S. Coffa and J. M. Poate, Appl. Phys. Lett. 59. 2296 (1991).
11. T. M. Mayer, E. Chason, and A. J. Howard, J. Appl. Phys. 76, 1633 (1994).
12. E. Chason, T. M. Mayer, B. K. Kellerman, D. T. Mcllroy, and A. J. Howard, Phys. Rev. Lett. 72, 3040 (1994).
13. R. Schlatmann, Ph.D. thesis, Free University of Amsterdam, 1995; R. Schlatmannm J. D. Shindler, and J. Verhoeven, Phys. Rev. B (submitted).
14. R. Schlatmann, Ph.D. thesis, Free University of Amsterdam, 1995; R. Schlatmannm J. D. Shindler, and J. Verhoeven, Phys. Rev. B (submitted).
15. M. P. Bruijn, P. Chakraborty, H. W. van Essen, J. Verhoeven, M. J. van der Wiel, and W. J. Bartels, Proc. SPIE 563, 182 (1985).
16. J. Verhoeven, A. Keppel, R. Schlatmann, Y. Xue, and I. V. Katardjiev, Nucl. Instrum. Methods B 94, 395 (1994).
17. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
18. W.-K Chu, J. W. Mayer, and M.-A Nicolet, Backscattering Spectrometry, (Academic, New York, 1978).
19. W. M. Arnold Bik and F. H. P. M. Habraken, Rep. Prog. Phys. 56, 859 (1993).
20. L. R. Doolittle, Nucl. Instrum. Methods B 9, 344 (1985).
21. P. Lambooy. Ph.D. thesis, Open University Heerlen, 1992.
22. R. Schltmann, C. Lu, J. Verhoeven, E. J. Puik, and M. J. van der Wiel, Appl. Surf. Sci. 78, 147 (1994)
23. The optical constants of the Si layer change during swelling, and the inflection points calculated are not exactly in between the thicknesses of neighboring extrema, because there is no linear relationship between time and layer thicknees. Theretore, the layer thicknees resolution is lower than usual with the reflection technique, with estimated errors of 2 Å on the extrema and 4 Å for the inflection points.
24. J. F. van der Veen, Surf. Sci Rep 5, 199 (1986).
25. G. Uconky. J. Non-Cryst. Solids 76, 173 (1985).
26. H. Wagner and W. Beyer, Solid State Commun. 48, 585 (1983).
27. M. Vergant, S. Houssaini, G. Marchal, Ph. Mangin, and C. Vettier, Phys. Rev. B 47, 7584 (1993).
28. D. G Stearns, M. B. Stearn, Y. Cheng, J. H. Stilth, and N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990).
29. Z. Jiang, X. Jiang, W. Liu, and Z. Wu, J. Appl. Phys 65, 196 (1989)
30. M. J. van den Boogaard, Ph.D. thesis, University of Utrecht,. 1988, chap. 6.