Resonance characteristics of micro cantilever in liquid

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7064-7069

  Hirai, Yoshihiko ^a   Mori, Ryosuke ^a   Kikuta, Hisao ^a   Kato, Nobuhiro ^a   Inoue, Koji ^b   Tanaka, Yoshio ^a  

^a Osaka Prefecture University   (Japan)

^b OSAKA MUNICIPAL TECHNICAL RESEARCH INSTITUTE   (Japan)

Author keywords

Drag force; Frequency response; Liquid; Micro cantilever; Optical lever; Resonance; Viscous fluid

Indexed keywords

EID: 0012748080     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7064     Document Type: Article

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