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Volumn 39, Issue 34, 2000, Pages 6421-6429

Measurement and calibration of interferometric imaging aberrations

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; IMAGING SYSTEMS; INTERFEROMETERS; INTERFEROMETRY; OPTICAL TESTING;

EID: 0012745169     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.006421     Document Type: Article
Times cited : (38)

References (15)
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    • Greivenkamp, J.E.1    Lowman, A.E.2    Palum, R.J.3
  • 5
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    • Optical Vernier interferometry for aspheric metrology
    • Y. Vladimirsky, ed., Proc. SPIE
    • P. E. Murphy, T. G. Brown, and D. T. Moore, “Optical Vernier interferometry for aspheric metrology,” in Emerging Lithographic Technologies III, Y. Vladimirsky, ed., Proc. SPIE 3676, 643-652 (1999).
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    • Murphy, P.E.1    Brown, T.G.2    Moore, D.T.3
  • 6
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    • Interferometer induced wavefront errors when testing in a non-null configuration
    • G. M. Brown, and W. E. Jeuptner, eds., Proc. SPIE
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    • (1993) Interferometry VI: Applications , vol.2004 , pp. 173-181
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  • 7
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    • Modeling an interferometer for non-null testing of aspheres
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    • A. E. Lowman and J. E. Greivenkamp, “Modeling an interferometer for non-null testing of aspheres,” in Optical Manufacturing and Testing, V. J. Daugherty and H. Stabl, eds., Proc. SPIE 2536, 139-147 (1995).
    • (1995) Optical Manufacturing and Testing , vol.2536 , pp. 139-147
    • Lowman, A.E.1    Greivenkamp, J.E.2
  • 8
    • 0027151167 scopus 로고
    • Compensation for errors introduced by non-zero fringe densities in phase-measuring interferometers
    • C. J. Evans, “Compensation for errors introduced by non-zero fringe densities in phase-measuring interferometers,” CIRP Annals 42/1, 577-580 (1993).
    • (1993) CIRP Annals , vol.42 , Issue.1 , pp. 577-580
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  • 9
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    • C. J. Evans, “Software based improvements in the accuracy of measurement of aspherics using a Fizeau interferometer,” Optical Fabrication and Testing, Vol. 13 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), pp. 259-267.
    • (1994) Optical Fabrication and Testing , vol.13 , pp. 259-267
    • Evans, C.J.1
  • 11
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    • Influence of system aberrations on interferometric aspheric surface testing
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    • H. Kurita, K. Saito, M. Kato, and T. Yatagai, “Influence of system aberrations on interferometric aspheric surface testing,” in Laser and Nonlinear Optical Materials, L. G. DeShazer, ed., Proc. SPIE 680, 47-52 (1987).
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  • 12
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    • H. Zhang, M. J. Lalor, and D. R. Burton, “Robust, accurate seven-sample phase-shifting algorithm insensitive to nonlinear phase-shift error and second-harmonic distortion: a com parative study,” Opt. Eng. 38, 1524-1533 (1999).
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.