Angstrom ruler for high-accuracy pitch measurement

Applied Optics

Volumn 39, Issue 25, 2000, Pages 4535-4539

  Lin, Wang ^a   Dacheng, Li ^b   Mang, Cao ^b   Koenders, Ludger ^c   Kuetgens, Ulrich ^c   Becker, Peter ^c  

^a University of Wisconsin Madison   (United States)

^b TSINGHUA UNIVERSITY   (China)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; MICROSCOPES; OPTICAL RESOLVING POWER; SCANNING; SILICON; X RAY OPTICS;

ANGSTROM RULER;

OPTICAL VARIABLES MEASUREMENT;

EID: 0012716857     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.004535     Document Type: Article

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