SOI-structures produced by the silicon direct bonding method

Materials Science and Engineering B

Volumn 46, Issue 1-3, 1997, Pages 33-37

  Enisherlova, K L ^a   Rusak, T F ^a   Chervyakova, E N ^a   Vinogradov, R N ^a  

^a SSRI 'Pulsar'   (Russian Federation)

Author keywords

Direct bonding method; IR photometry; Silicon on insulator structures

Indexed keywords

BONDING; ELECTRIC CHARGE; ELECTRONIC DENSITY OF STATES; INTERFACES (MATERIALS); KINEMATICS; PHOTOMETRY; SEMICONDUCTOR DEVICE STRUCTURES; SILICA;

DIRECT BONDING METHOD; INFRARED PHOTOMETRY;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0012716221     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01928-9     Document Type: Article

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