Magnetic nanostructures produced by electron beam patterning of direct write transition metal fluoride resists

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1374-1379

  Streblechenko, Dmitry ^a   Scheinfein, M R ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012710537     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581154     Document Type: Article

References (18)

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