Capacitance-voltage curve recovery of MOS capacitors passivated with BaF2-BeF2-SiO2-B2O 3-P2O5 glasses

Journal of Materials Chemistry

Volumn 7, Issue 1, 1997, Pages 127-129

  Kobayashi, Keiji ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012686170     PISSN: 09599428     EISSN: None     Source Type: Journal    
DOI: 10.1039/a602563c     Document Type: Article

References (19)

1. K. H. Hurley, Solid State Technol., 1987, 30, 103.
2. J. E. Dickinson Jr. and B. H. W. S. deJong, J. Non-Cryst. Solids, 1988, 102, 196.
3. N. F. Raley and D. L. Losee, J. Electrochem. Soc., 1988, 135, 2640.
4. G. L. Schnable, A. W. Fisher and J. M. Shaw, J. Electrochem. Soc., 1990, 135, 3973.
5. K. Kobayashi, J. Non-Cryst. Solids, 1986, 88, 229.
6. K. Kobayashi, J. Non-Cryst. Solids, 1994, 176, 208.
7. K. Kobayashi, J. Non-Cryst. Solids, 1993, 159, 274.
8. K. Kobayashi, Glass Technol., 1988, 29, 253.
9. K. Kobayashi, Glass Technol., 1989, 30, 110.
10. K. Kobayashi, J. Electrochem. Soc., 1984, 131, 2190.
11. S. Rojas, R. Gomarasca, L. Zanotti, A. Borghesi, A. Sassela, G. Ottaviani, L. Moro and P. Lazzeri, J. Vac. Sci. Technol. B, 1992, 10, 633.
12. K. Kobayashi, J. Solid State Chem., 1995, 120, 54.
13. S. C. Li, S. P. Murarka, X. S. Guo and W. A. Lanford, J. Appl. Phys., 1992, 72, 2947.
14. G. Baret, R. Madar and C. Bernar, J. Electrochem. Soc., 1991, 138, 2835.
15. K. Kobayashi, J. Non-Cryst. Solids, 1990, 124, 229.
16. C. M. Shaw and J. E. Shelby, Phys. Chem. Glasses, 1993, 34, 35.
17. K. Kobayashi, Glass Technol., 1993, 34, 120.
18. J. A. Ruller and J. E. Shelby, Phys. Chem. Glasses, 1992, 33, 177.
19. Z-H. Liang and G. H. Frischat, J. Non-Cryst. Solids, 1993, 163, 169.