Real-time Fourier transform infrared spectroscopy study of the kinetics of acid-catalyzed negative-tone resists based on hexamethoxymethylmelamine and phenolic resins

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3759-3766

  Dentinger, Paul M ^a,b   Taylor, James W ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012605447     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590403     Document Type: Article

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