Vacuum arc deposition of Ti films with transverse current injection

Journal of Applied Physics

Volumn 82, Issue 8, 1997, Pages 4062-4066

  Parkansky, N ^a   Alterkop, B ^a   Schuster, W ^a   Boxman, R L ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012531886     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365716     Document Type: Article

References (12)

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