Precipitation of Al2Cu in blanket Al-Cu films

Journal of Applied Physics

Volumn 82, Issue 8, 1997, Pages 3821-3827

  Marcus, Matthew A ^a   Bower, J Eric ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012131394     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365745     Document Type: Article

References (20)

1. D. R. Frear, J. R. Michael, C. Kim, A. D. Romig, Jr., and J. R. Morris, Jr., Metallization: Performance and Reliability Issues for VLSI and ULSI, SPIE Vol. 1596 (1991), p. 72.
2. D. R. Frear, J. R. Michael, and A. D. Romig, Jr., Mater. Res. Soc. Symp. Proc. 309, 359 (1993).
3. D. Weston, S. R. Wilson, and M. Kottke, J. Vac. Sci. Technol. A 8, 2025 (1990).
4. E. G. Colgan, K. P. Rodbell, C. Cabral, Jr., and J. M. E. Harper, Materials Research Society Conference Proceedings ULSI-IX (Materials Research Society, Pittsburgh, 1994), p. 257.
5. J. J. Rehr and R. C. Albers, Phys. Rev. B 41, 8139 (1990); J. J. Rehr, J. Mustre de Leon, S. I. Zabinsky, and R. C. Albers, J. Am. Chem. Soc. 113, 5135 (1991); J. Mustre de Leon, J. J. Rehr, S. I. Zabinsky, and R. C. Albers, Phys. Rev. B 44, 4146 (1991).
6. J. J. Rehr and R. C. Albers, Phys. Rev. B 41, 8139 (1990); J. J. Rehr, J. Mustre de Leon, S. I. Zabinsky, and R. C. Albers, J. Am. Chem. Soc. 113, 5135 (1991); J. Mustre de Leon, J. J. Rehr, S. I. Zabinsky, and R. C. Albers, Phys. Rev. B 44, 4146 (1991).
7. J. J. Rehr and R. C. Albers, Phys. Rev. B 41, 8139 (1990); J. J. Rehr, J. Mustre de Leon, S. I. Zabinsky, and R. C. Albers, J. Am. Chem. Soc. 113, 5135 (1991); J. Mustre de Leon, J. J. Rehr, S. I. Zabinsky, and R. C. Albers, Phys. Rev. B 44, 4146 (1991).
8. A. Fontaine, P. Lagarde, A. Naudon. D. Rauox, and D. Spanjaard, Philos. Mag. 40, 17 (1979).
9. X-ray Absorption: Principles, Applications, Techniques of EXAFS, SEX-AFS and XANES, edited by D. C. Koningsberger and R. Prins (Wiley, New York, 1988).
10. P. A. Lee, P. H. Citrin, P. Eisenberger, and B. M. Kincaid, Rev. Mod. Phys. 53, 769 (1981).
11. Metals Handbook, Metallography, Structures and Phase Diagrams, 8th ed. (American Society for Metals, Metals Park, Ohio, 1973), Vol. 8.
12. A. D. Brailsford and H. B. Aaron, J. Appl. Phys. 40, 1702 (1969).
13. J. Goldman, H. I. Aaronson, and H. B. Aaron, Metall. Trans. A 1, 1805 (1970).
14. M. B. Chamberlain and S. L. Lehoczky, Thin Solid Films 45, 189 (1977).
15. N. J. Peterson and S. J. Rothman, Phys. Rev. B 1, 3264 (1970).
16. D. R. Frear, J. E. Sanchez, Jr., A. D. Romig, Jr., and J. W. Morris, Jr., Metall. Trans. A 21, 2449 (1990).
17. J. Sanchez and E. Arzt, Mater. Res. Soc. Symp. Proc. 309, 417 (1993).
18. W. C. Shih and A. L. Greer, J. Electron. Mater. 23, 1315 (1994).
19. David L. Barr, G. J. Gualieri, C. B. Case, M. A. Marcus, and W. L. Brown, Mater. Res. Soc. Symp. Proc. 309, 417 (1993).
20. M. L. Dreyer and C. J. Varker, Appl. Phys. Lett. 60, 1860 (1992).