Reactive-sputter deposition and structure of RuO2 films on sapphire and strontium titanate

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 747-752

  Wang, Q ^a   Gladfelter, Wayne L ^a   Evans, D Fennell ^a   Fan, Yue ^a   Franciosi, Alfonso ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012085801     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580382     Document Type: Article

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