Optical properties of micromachined polysilicon reflective surfaces with etching holes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 307-314

  Zou, Jun ^a   Byrne, Colin ^a   Liu, Chang ^a   Brady, David ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Diffraction; MUMPS; Optical properties; Reflectivity

Indexed keywords

DIFFRACTION; ETCHING; INTEGRATED CIRCUITS; LASER BEAMS; MICROMACHINING; MICROOPTICS; OPTICAL SYSTEMS; OPTIMIZATION; POLYSILICON; REFLECTION; SURFACE ROUGHNESS;

ETCHING HOLES; LIGHT SPECTRUM;

MICROELECTRONIC PROCESSING;

EID: 0012070883     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324315     Document Type: Conference Paper

References (3)

1. Y. Yi and C. Liu, "Parallel Assembly of Hinged Microstructures Using Magnetic Actuation", The 1998 Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 8-11, 1998, pp 269-272
2. C. A. Balanis, "Advanced Engineering Electromagnetics", John Wiley & Sons, New York, USA, 1989, pp 185-189
3. S. A. Akhmanov and S. Yu. Nikitin, "Physical Optics", Clarendon Press, Oxford, Britain, 1997, pp 294-310