Effects of cleavage on local cross-sectional stress distribution in trench isolation structure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. B, 1997, Pages 1335-1340

  Yagishita, Atsushi ^a   Saito, Tomohiro ^a   Matsuda, Satoshi ^a   Ushiku, Yukihiro ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Cleavage; Cross section; Defects; Elastic simulation; Isolation; Polarization; Raman spectroscopy; Stress; Trench

Indexed keywords

EID: 0012064860     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.1335     Document Type: Article

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