Measurements of electromagnetic fields in a planar radio-frequency inductively coupled plasma source

Journal of Applied Physics

Volumn 78, Issue 1, 1995, Pages 90-96

  Meyer, J A ^a   Wendt, A E ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012062951     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.360585     Document Type: Article

References (0)