Micropatterning for advanced interconnections

Journal of Photopolymer Science and Technology

Volumn 9, Issue 4, 1996, Pages 541-552

  Vinet, F ^a   Paniez, P J ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012025920     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.9.541     Document Type: Article

References (8)

1. P. J. Paniez, C. Rosilio, B. Mouanda, F. Vinet, Proc. SPIE, Vol. 2195, pp 14 -27, (1994).
2. F. Vinet, N. Buffet, P. Fanton, L. Pain, P. J. Paniez, Proc. SPIE, Vol. 2438 pp. 202-210, (1995).
3. J. Sturtevant et al., Proc. SPIE, Vol. 2197, pp. 770-780, (1994).
4. F. Vinet, P. J. Paniez, M. Heitzmann, T. Mourier, D. Poncet, B. Previtali, A. Shiltz, C. Vizioz, presented at the SPIE's 1996 International Symposium on Microlithography Santa Clara, CA, (1996).
5. O. Joubert, C. Fiori, J. C. Oberlin, P. J. Paniez, J. Pelletier, M. Pons, T. Vachette, A. Weill, J. Appl. Phys., 69 (3), 1 February (1991).
6. A. Hall and K. Nojiri, Solid State Techn., p. 107, May (1991).
7. W. Sesselmann and T. J. Chuang, Surface Science, 176, pp. 32-40, (1986).
8. Private communication, T. Herbert - National Microelectronics Research Center, Cork, Ireland, (Dec 1994).