Enhancement of diamond thin film quality by a cyclic deposition method under MPECVD

Materials Science and Engineering: A

Volumn 209, Issue 1-2, 1996, Pages 414-419

  Park, Y S ^a   Kim, S H ^a   Jung, S K ^a   Shinn, M N ^a   Lee, J W ^a   Hong, S K ^a   Lee, J Y ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cyclic deposition; Diamond thin films; Microwave plasma CVD

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; MICROWAVES; PLASMA APPLICATIONS; THIN FILMS;

CYCLIC DEPOSITION; DIAMOND THIN FILMS; MICROWAVE PLASMA;

DIAMOND FILMS;

EID: 0011992098     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(95)10113-6     Document Type: Article

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