Boxer Cross measurements of laser annealed shallow junctions

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 2000, Pages 646-649

  Sing, David ^a   Borden, Peter ^b   Bechtler, Laurie ^b   Murto, Robert ^c   Talwar, Somit ^d  

^a MOTOROLA INC   (United States)

^b Boxer Cross Inc   (United States)

^c TEXAS INSTRUMENTS   (United States)

^d Verdant Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER DENSITY; CARRIER ILLUMINATION; CROSS-MEASUREMENTS; DEPTH VARIATION; DOPANT DISTRIBUTION; ENERGY DENSITY; INDEX OF REFRACTION; LASER THERMAL ANNEALING; PHYSICAL PROCESS; PRE-AMORPHIZATION IMPLANT; RE CRYSTALLIZATIONS; SHALLOW JUNCTION; SILICON SAMPLES; TEM; ULTRA SHALLOW JUNCTION;

ANNEALING; ARSENIC; BORON; BORON COMPOUNDS; CRYSTALLIZATION; DISTRIBUTION FUNCTIONS; ELECTRIC RESISTANCE; GERMANIUM; LASER HEATING; PHOSPHORUS; REFRACTIVE INDEX; SILICON WAFERS; THERMOANALYSIS;

ION IMPLANTATION;

EID: 0011982191     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/.2000.924236     Document Type: Conference Paper

References (5)

1. Semiconductor Industry Association, International Technology Roadmap for Semiconductors: 1999 Edition, Austin, TX: International SEMATECH, 1999.
2. M. Thompson, G. Galvin, J. Mayer, P. Peercy, J. Poate, D. Jacobson, A. Cullis and N.Chew, "Melting Temperature and Explosive Crystallization of Amorphous Silicon During Pulsed Laser Irradiation," Physical Review Letters, vol. 52, P2360, 1984.
3. P. Peercy and M. Thompson, "Kinetic and Thermodynamic Studies of Pulsed Laser Irradiation," SPIE Vol. 668 Laser Processing Fundamentals, Applications and Systems Engineering, P72, 1986.
4. J. Poate, "High Speed Crystal Growth and Solidification Using Laser Heating," Journal of Crystal Growth, vol. 79, P549, 1986.
5. P. Borden, "Carrier Illumination characterization of ultrashallow implants," in Handbook of Silicon Semiconductor Metrology, A. Diebold Ed., New York: Marcel Dekker, 2001, in press.