Phase formation process of sputtered NiCr(37:63) thin films

Fresenius' Journal of Analytical Chemistry

Volumn 361, Issue 6-7, 1998, Pages 608-609

  Pitschke, W ^a   Bruckner W ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011940631     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160050965     Document Type: Article

References (4)

1. Seidel JP, Muralt P, Rietzler W, Hall R (1990) Hybrid Circuit Technol 7:17
2. Vollaro MB, Potter DI (1994) Thin Solid Films 239:37
3. Bechtoldt CJ, Vacher HC (1961) Trans Met Soc AIME 221:14
4. Nash P (1992) In: Massalski TB (ed) Binary Alloy Phase Diagrams, vol 2. ASM International, Materials Park, Ohio, p 1298