A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges

Journal of Computational Physics

Volumn 77, Issue 1, 1988, Pages 53-72

  Barnes, Michael S ^a   Cotler, Tina J ^a   Elta, Michael E ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011934517     PISSN: 00219991     EISSN: 10902716     Source Type: Journal    
DOI: 10.1016/0021-9991(88)90156-8     Document Type: Article

References (36)

1. Plasma Etching and Reactive Ion Etching
2. A Continuum Model of DC and RF Discharges
3. Monte Carlo simulation of electrons within the cathode fall of a glow discharge in helium
4. Transport equations for electrons in two-valley semiconductors
5. Weak solutions of nonlinear hyperbolic equations and their numerical computation
6. NCAR Technical Note 63-2
7. Proceedings, 2nd Intl. Conf. on Numerical Methods in Fluid Dynamics
8. On the solution of nonlinear hyperbolic differential equations by finite differences
9. Modeling of low-pressure gas discharges
10. Structure of RF Parallel-Plate Discharges