Removal Efficiency of Metallic Impurities on Various Substrates in HF-Based Solutions

Journal of the Electrochemical Society

Volumn 148, Issue 5, 2001, Pages

  Choi, Geun Min ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011818640     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1360189     Document Type: Article

References (34)

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