Photoresist ashing by atmospheric pressure glow plasma

Journal of Photopolymer Science and Technology

Volumn 10, Issue 1, 1997, Pages 113-118

  Taniguchi, Kensuke ^a   Tanaka, Kunihito ^a   Inomata, Tadaaki ^a   Kogoma, Masuhiro ^a  

^a SOPHIA UNIVERSITY   (Japan)

Author keywords

Ashing mechanism; Atmospheric pressure glow plasma; Photoresist ashing

Indexed keywords

EID: 0011807406     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.10.113     Document Type: Article

References (17)

1. T. Yokoyama, M. Kogoma, T. Moriwaki and S. Okazaki, J. Phys. D, 23, 1125 (1990).
2. T. Yokoyama, M. Kogoma, S. Kanazawa, T. Moriwaki and S. Okazaki, J. Phys. D, 23, 374 (1990).
3. H. Nakamura, M. Kogoma, H. Jinno and S. Okazaki, Proc. Jpn. Symp. Plasma Chem., 4, 339 (1991)
4. T. Kosugi, S. Okazaki, H. Jinno and M. Kogoma, Proc. Jpn. Symp. Plasma Chem., 5, 77 (1992)
5. T. Suwa, S. Okazaki, T. Inomata and M. Kogoma, Proc. 13th Symp. Plasma Processing, 283 (1996)
6. M. Kogoma, S. Okazaki, N. Kanda, H. Uchiyama and H. Jinno, Proc. Jpn. Symp. Plasma Chem., 4, 345 (1991)
7. F. W. Breitbarth, E. Ducke and H. J. Tiller, Plasma Chemistry and Plasma Processing, 10(3), 377 (1990)
8. R. E. Wakeup, K. L. Saenger and G. S. Selwyn, J. Chem. Phys., 84(5), 2668 (1986)
9. R. d'Agostino, F. Cramarossa, S. De Benedictis and G. Ferraro, J. Appl. Phys., 52(3), 1259 (1981)
10. J. W. Coburn and M. Chen, J. Appl. Phys., 51(6), 3134 (1980)
11. A. Szekeres, K. Kirov and S. Alexandrova, Phys. Status Solidi, A63, 371 (1981)
12. B. R. Scoller, R. F. Shuman and R. R. Ross, J. Electrochem. Soc., 131(2), 868 (1984)
13. E. P. G. T. van der Ven, Electrochem. Soc. Ext. Abst., 133, 1922 (1976)
14. S. Fujimura, K. Shinagawa, M. T. Suzuki and M. Nakamura, J. Vac. Sci. Technol., B9(2), 357 (1991)
15. S. Fujimura, K. Hikazutani, K. Shinagawa and H. Yano, Symp. Proc. 9th International Symp. Plasma Chem., 2, 1062 (1989)
16. S. Tachi and S. Okudaira, J. Vac. Sci. Technol., B4(2), 459 (1986)
17. S. Tachi, Oyobuturi, 11, 1428 (1990)