Mechanical processing of standard rulers with one-nanometer depth of muscovite mica using an atomic force microscope

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 65, Issue 4, 1999, Pages 570-574

  Miyake, Shojiro ^a   Otake, Toshiaki ^a   Asano, Masashi ^a  

^a NONE

Author keywords

Atomic force microscope; Mechanical processing; Muscovite mica and standard ruler; Nanometer scale processing

Indexed keywords

EID: 0011493833     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.65.570     Document Type: Article

References (12)

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