Nano processing by hard film coated tips and movement of processed nanoslider supported by van der Waals forces

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 66, Issue 8, 2000, Pages 1275-1279

  Miyake, Shojiro ^a   Asano, Masashi ^a  

^a NONE

Author keywords

Atomic force microscope; Muscovite mica; Nanometer scale processing; Nanoslider; van der Waals bearing

Indexed keywords

EID: 0011403961     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.66.1275     Document Type: Article

References (12)

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3. S. Miyake : Atomic-scale Wear Properties of Muscovite Mica Evaluated by Scanning Probe Microscopy, Appl. Phys. Lett., 65, 8 (1994) 980.
4. S. Miyake : lnm Depth Processing of Muscovite Mica by Mechanical Sliding, Appl. Phys. Lett., 67, 13 (1995) 2925.
5. M. Murakawa and S. Watanabe: The Synthesis of Cubic BN Films Using a Hot Cathode Plasma Discharge in a Parallel Magnetic Field, Surf. Coat. Tech.,43-44, 1-3 (1990) 128-136.