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Journal of Applied Physics

Volumn 80, Issue 9, 1996, Pages 5415-5421

Room temperature oxidation enhancement of porous Si(001) using ultraviolet-ozone exposure

(6) Thompson, W Howard a Yamani, Zain a Abu Hassan, Laila H a,c Greene, J E a Nayfeh, Munir a Hasan, M A b

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

b University of North Carolina at Charlotte (United States)

c UNIVERSITY OF JORDAN (Jordan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011040248 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.362728 Document Type: Article

Times cited : (30)

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