Laser direct writing of copper on polyimide, FR4, and Al2O3 substrates from solid metalorganic film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 403-410

  Wang, X C ^a   Zheng, H Y ^a   Lim, G C ^a  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Copper deposition; Copper formate; Electroless plating; Nd:YAG laser

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ARGON LASERS; CHEMICAL ANALYSIS; ELECTRIC CONDUCTIVITY; ELECTROLESS PLATING; LASER APPLICATIONS; LASER BEAMS; MICROELECTRONICS; MORPHOLOGY; NEODYMIUM COMPOUNDS; NEODYMIUM LASERS; POLYIMIDES; SUBSTRATES; SURFACE MORPHOLOGY; YTTRIUM ALUMINUM GARNET;

CHEMICAL COMPOSITIONS; COPPER DEPOSITION; COPPER FORMATE; ELECTRICAL CONDUCTIVITY; ELECTROLESS COPPER PLATING; ELECTROLESS PLATING PROCESS; LASER DIRECT WRITING; ND : YAG LASERS;

COPPER COMPOUNDS;

EID: 0011016680     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432533     Document Type: Conference Paper

References (13)

1. T. H. Baum, P. B. Comita, and T. T. Kodas, "Laser-induced gold deposition for thin film circuit repair," in SPIE Poc., 1991, p. 122.
2. D. J. Ehrlich and J. Y. Tsao, "A review of laser-microchemical processing," J. Vac. Sci. Techn., B1, pp. 969-984, 1983.
3. J. G. Black, S. P. Doran, M. Rothschild, and D. J. Ehrlich, "Supplemental multilevel interconnects by laser direct writing: Application to GaAs digital integrated circuits," Appl. Phys. Lett., 50, pp. 1016-1018, 1987.
4. H. S. Cole, Y. S. Liu, J. W. Rose, and R. Guida, "Laser-induced selective copper deposition on polyimide," Appl. Phys. Lett., 53, pp. 2111-2113, 1988.
5. Heinrich G. Müller, "Photothermal formation of copper conductors on multichip module substrates using a Nd:YAG laser," IEEE transactions on components, hybrids, and manufacturing technology, 16, pp. 530-535, 1993.
6. R. B. Gerassimov, S. M. Metev, and S. K. Savtchenko, "Laser-induced decomposition of organometallic compounds," in IEEE XIIth Int. Quantum Electron. Conf., 1982, pp. 266.
7. K. W. Beeson, and N. S Clements, "Fast photolytic writing of gold lines on a prenucleated substrate," Appl. Phys. Lett., 53, pp. 547, 1988.
8. A. Gupta and R. Jagannathan, "Laser writing of copper lines from metalorganic films," Appl. Phys. Lett., 51, pp. 2254, 1987.
9. P. Hoffman, B. Lecohier, S. Goldoni, and H. Van den Bergh, "Fast laser writing of copper and iridium lines from thin solid surface layers of metalorganic compounds," Appl. Surf. Sci., 43, pp. 54, 1989.
10. H. G. Muller, "YAG laser direct writing of copper from copper formate films," Appl. Phys. Lett., 56, pp. 904, 1990.
11. S. Evoy, R. Izquierdo, M. Bernier, M. Meunier, and E. Sacher, "Diode laser-assisted pyrolysis of organometallic films for the fabrication of metallic conductors on polyimide," IEEE Transactions on components, packaging, and manufacturing technology," Part B, 18, pp. 697, 1995.
12. M. E. Gross, A. Appelbaum, and P. K. Gallagher, "Laser direct-write metallization in thin palladium acetate films," J. Appl. Phys., 61, pp. 1628, 1987.
13. A. K. Galwey, D. M. Jamieson, and M. E. Brown, "Thermal decomposition of three crystalline modifications of anhydrous copper (II) formate," J. Phys. Chem., 78, pp. 2664, 1974.