NiTi thin film characterization by Rutherford backscattering spectrometry

Materials Science and Engineering B

Volumn 40, Issue 2-3, 1996, Pages 185-189

  Goldberg, Florent ^a   Knystautas, Émile J ^a  

^a NONE

Author keywords

Nickel; Rutherford backscattering; Thin films; Titanium

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SHAPE MEMORY EFFECT; SPECTROMETRY; SPUTTERING; STOICHIOMETRY; TEMPERATURE CONTROL; TITANIUM ALLOYS;

CHARACTERISTIC TRANSFORMATION TEMPERATURE; MICROELECTROMECHANICAL ACTUATORS;

THIN FILMS;

EID: 0010898422     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(96)01593-0     Document Type: Article

References (23)

1. J.D. Busch, A.D. Johnson, C.H. Lee and D.A. Stevenson, J. Appl. Phys., 68 (1990) 6224.
2. J.A. Walker, K.J. Gabriel and M. Mehregany, Sensors and Actuators, A21-23 (1990) 243.
3. A.D. Johnson, J. Micromech. Microeng., 1 (1991) 24.
4. K.R. Collen, A.B. Ellis, J.D. Busch and A.D. Johnson, Mater. Res. Symp. Proc., 230 (1992) 97.
5. W.J. Moberly, J.D. Busch, A.D. Johnson and M.H. Berkson, Mater. Res. Soc. Symp. Proc., 230 (1992) 85.
6. J.D. Busch, M.H. Berkson and A.D. Johnson, Mater. Res. Soc. Symp. Proc., 230 (1992) 91.
7. K.R.C. Gisser, J.D. Busch, A.D. Johnson and A.B. Ellis, Appl. Phys. Lett., 61 (1992) 1632.
8. A. Ishida, A. Takei and S. Miyazaki, Thin Solid Films, 228 (1993) 210.
9. A.P. Jardine and J.S. Madsen, Smart materials and structures, Proc. SPIE, vol. 1916, 1993, p. 384.
10. S.Z. Hua, C.M. Su and M. Wuttig, Mater. Res. Soc. Symp., 308 (1993) 33.
11. J.S. Madsen and A.P. Jardine, Mater. Res. Soc. Symp., 308 (1993) 45.
12. K. Kuribayashi, S. Shimizu, T. Nishinohara, T. Taniguchi, M. Yoshitake and S. Ogawa, Proc. 1993 IEEE, RSJ Int. Conf. on Intel. Rob. and Sys., Yokohama, Japan, July 26-30, 1993, p. 1697.
13. J.S. Madsen and A.P. Jardine, Scr. Metall. Mater., 30 (1994) 1189.
14. A.P. Jardine, J.S. Madsen and P.G. Mercado, Mater. Characterization, 32 (1994) 169.
15. S. Miyazaki and A. Ishida, Materials transactions, JIM, 35 (1994) 14.
16. S. Miyazaki and K. Nomura, Micro-electro-mechanical systems, Proc. IEEE (1994) 176.
17. A.P. Jardine, Smart Mater. Struct., 3 (1994) 140.
18. Y.Q. Yang, H.S. Jia, Z.F. Zhang, H.M. Shen, A. Hu and Y.N. Wang, Mater. Lett., 22 (1995) 137.
19. R. Tertian, F. Claisse, Principles of Quantitative X-Ray Fluorescence Analysis, Heyden, London, 1982, p. 278.
20. W.K. Chu, J.W. Mayer and M.-A. Nicolet, Backscattering Spectrometry, Academic Press, New York, 1978.
21. J.F. Ziegler, J.P. Biersack and U. Littmark The Stopping and Range of Ions in Solids, Pergamon, New York, 1985.
22. Z. Margalìot, BURP v 2.0, Ontario Center for Materials Research, University of Western Ontario, 1990.
23. J.A. Leavitt, Nucl. Instrum. and Methods in Phys. Res. B24/25 (1987) 717.