Theoretical and experimental study of low-temperature, capacitively coupled, radio-frequency helium plasmas

Journal of Applied Physics

Volumn 75, Issue 6, 1994, Pages 2789-2798

  Riley, M E ^a   Greenberg, K E ^a   Hebner, G A ^a   Drallos, P ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010804901     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.357021     Document Type: Article

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