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Volumn 38, Issue 7, 1999, Pages 1163-1168

Design approaches with a lenslet array and a single, high-numerical-aperture annular-field objective lens for optical data storage systems that incorporate large numbers of parallel read–write–erase channels

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0010760966     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.001163     Document Type: Article
Times cited : (8)

References (7)
  • 2
    • 0041949581 scopus 로고
    • Molded optics: Mating precision and mass production
    • M. A. Fitch, “Molded optics: mating precision and mass production,” Photon. Spectra 25, 83-87 (1991).
    • (1991) Photon. Spectra , vol.25 , pp. 83-87
    • Fitch, M.A.1
  • 3
    • 85010133659 scopus 로고    scopus 로고
    • Examples of these emerging technologies include vertical cavity laser diode arrays, large arrays of miniature spatial light modulators, integrated optical waveguide-modulator-detector arrays, smart-pixel detector arrays, micromechanical actuators, and miniature beam scanners
    • Examples of these emerging technologies include vertical cavity laser diode arrays, large arrays of miniature spatial light modulators, integrated optical waveguide-modulator-detector arrays, smart-pixel detector arrays, micromechanical actuators, and miniature beam scanners.
  • 5
    • 85010133655 scopus 로고    scopus 로고
    • 2, which is approximately 1/N of the area of the circle
    • 2, which is approximately 1/N of the area of the circle.
  • 6
    • 0016486141 scopus 로고
    • New concepts in projection mask aligners
    • A. Offner, “New concepts in projection mask aligners,” Opt. Eng. 14, 130-132 (1975).
    • (1975) Opt. Eng. , vol.14 , pp. 130-132
    • Offner, A.1
  • 7
    • 0023563437 scopus 로고
    • Quality of microlithographic projection lenses
    • H. L. Stover and S. Wittekoek, eds., Proc. SPIE
    • J. Braat, “Quality of microlithographic projection lenses,” in Optical Microlithography for Integrated Circuit Fabrication and Inspection, H. L. Stover and S. Wittekoek, eds., Proc. SPIE 811, 22-30 (1987).
    • (1987) Optical Microlithography for Integrated Circuit Fabrication and Inspection , vol.811 , pp. 22-30
    • Braat, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.