Study on Hydrogenation of Polysilicon Thin Film Transistors by Ion Implantation

IEEE Transactions on Electron Devices

Volumn 42, Issue 6, 1995, Pages 1134-1140

  Cao, Min ^a   Zhao, Tiemin ^a,b   Saraswat, Krishna C ^a   Plummer, James D ^a  

^a STANFORD UNIVERSITY   (United States)

^b XILINX INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010694297     PISSN: 00189383     EISSN: 15579646     Source Type: Journal    
DOI: 10.1109/16.387248     Document Type: Article

References (20)

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