Tradeoffs in micro-opto-electro-mechanical system materials

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1298-1306

  Cabuz, Cleopatra ^a,b,c,d  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

^b UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

^c TOHOKU UNIVERSITY   (Japan)

^d PUB   (Romania)

Author keywords

Dielectric; Electrostatic actuators; Materials; Micro opto electro mechanical systems; Resonators

Indexed keywords

EID: 0010642549     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601330     Document Type: Article

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