SCOPUS 정보 검색 플랫폼

Volumn 10, Issue 8, 1998, Pages 1699-1706

Atomic force microscopy investigation of polysilicon films before and after SIMS analysis: The effects of sample rotation

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010620347 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/10/8/006 Document Type: Article

Times cited : (3)

References (7)

1
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- Zalm P 1994 Rep. Prog. Phys. 58 1321
- (1994) Rep. Prog. Phys. , vol.58 , pp. 1321
- Zalm, P.¹

2
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- Stevie F A, Kahora P M, Simons D S and Chi P 1988 J. Vac. Sci. Technol. A 6 76
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 76
- Stevie, F.A.¹ Kahora, P.M.² Simons, D.S.³ Chi, P.⁴

3
- 0028419459
- Sykes D E and Chew A 1994 Surf. Interface Anal. 21 231
- (1994) Surf. Interface Anal. , vol.21 , pp. 231
- Sykes, D.E.¹ Chew, A.²

4
- 0344474795
- Chichester: Wiley
- Cirlin E-H and Vajo J J 1992 SIMS VIII (Chichester: Wiley) p 347
- (1992) SIMS VIII , pp. 347
- Cirlin, E.-H.¹ Vajo, J.J.²

5
- 0026816043
- Stevie F A and Moore J L 1992 Surf. Interface Anal. 18 147
- (1992) Surf. Interface Anal. , vol.18 , pp. 147
- Stevie, F.A.¹ Moore, J.L.²

6
- 0345337510
- Chichester: Wiley
- Chew A, Sykes D E, Mullock S J and Corlett C A 1994 SIMS IX (Chichester: Wiley) p 302
- (1994) SIMS IX , pp. 302
- Chew, A.¹ Sykes, D.E.² Mullock, S.J.³ Corlett, C.A.⁴

7
- 0001457863
- Szeles Cs, Nielsen B, Asoka-Kumar P, Lynn K G, Anderle M, Ma T P and Rubloff G W 1994 J. Appl. Phys. 76 3403
- (1994) J. Appl. Phys. , vol.76 , pp. 3403
- Szeles, Cs.¹ Nielsen, B.² Asoka-Kumar, P.³ Lynn, K.G.⁴ Anderle, M.⁵ Ma, T.P.⁶ Rubloff, G.W.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.