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Volumn 26, Issue 6, 1997, Pages 378-383

Charge degradation of MIS structures with phosphosilicate glass-passivated thermal silicon oxide at high-field tunnel injection

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EID: 0010611712     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (12)

References (18)
  • 1
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    • Phosphosilicate Glass Stabilization of FET Devices
    • Balk, P. and Eldridge, J.M., Phosphosilicate Glass Stabilization of FET Devices, Proc. IEEE, 1969, vol. 57, pp. 1558-1563.
    • (1969) Proc. IEEE , vol.57 , pp. 1558-1563
    • Balk, P.1    Eldridge, J.M.2
  • 5
    • 3342907346 scopus 로고
    • Model for Surface State Generation in MIS Structures under Tunnel Injection
    • Soldatov, V.S., Voevodin, A.G., and Kolyada, V.A., Model for Surface State Generation in MIS Structures under Tunnel Injection, Poverkhnost, 1990, no. 7, pp. 92-97.
    • (1990) Poverkhnost , Issue.7 , pp. 92-97
    • Soldatov, V.S.1    Voevodin, A.G.2    Kolyada, V.A.3
  • 6
    • 3342912482 scopus 로고
    • Charge Instability of MIS Structures in High Electric Fields
    • Mikhailovskii, I.P. and Epov, A.E., Charge Instability of MIS Structures in High Electric Fields, Mikroelektronika, 1985, vol. 14, no. 2, pp. 173-176.
    • (1985) Mikroelektronika , vol.14 , Issue.2 , pp. 173-176
    • Mikhailovskii, I.P.1    Epov, A.E.2
  • 10
    • 0000675006 scopus 로고
    • Generation of Positive Charge in Silicon Dioxide during Avalanche and Tunnel Electron Injection
    • Fischetti, M.V., Generation of Positive Charge in Silicon Dioxide During Avalanche and Tunnel Electron Injection, J. Appl. Phys., 1985, vol. 57, no. 8, pp. 2860-2879.
    • (1985) J. Appl. Phys. , vol.57 , Issue.8 , pp. 2860-2879
    • Fischetti, M.V.1
  • 11
    • 0022782157 scopus 로고
    • 2 Films on Silicon
    • 2 Films on Silicon, Mikroelektronika, 1986, vol. 15, no. 5, pp. 434-442.
    • (1986) Mikroelektronika , vol.15 , Issue.5 , pp. 434-442
    • Emel'yanov, A.M.1
  • 12
    • 0020193537 scopus 로고
    • Comparative Studies of Tunnel Injection and Irradiation on Metal Oxide Semiconductor Structures
    • Knoll, M., Braunig, D., and Fahrner, W.R., Comparative Studies of Tunnel Injection and Irradiation on Metal Oxide Semiconductor Structures, J. Appl. Phys., 1982, vol. 53, no. 10, pp. 6946-6952.
    • (1982) J. Appl. Phys. , vol.53 , Issue.10 , pp. 6946-6952
    • Knoll, M.1    Braunig, D.2    Fahrner, W.R.3
  • 14
    • 0027559742 scopus 로고
    • 2/Metal System under Injection Degradation
    • 2/Metal System under Injection Degradation, Mikroelektronika, 1993, vol. 22, no. 2, pp. 20-26.
    • (1993) Mikroelektronika , vol.22 , Issue.2 , pp. 20-26
    • Kasumov, Yu.N.1    Kozlov, S.N.2
  • 15
    • 21544458715 scopus 로고
    • Impact Ionization, Trap Creation, Degradation, and Breakdown in Silicon Dioxide Films on Silicon
    • DiMaria, D.J., Cartier, E., and Arnold, D., Impact Ionization, Trap Creation, Degradation, and Breakdown in Silicon Dioxide Films on Silicon, J. Appl. Phys., 1993, vol. 73, no. 7, pp. 3367-3384.
    • (1993) J. Appl. Phys. , vol.73 , Issue.7 , pp. 3367-3384
    • DiMaria, D.J.1    Cartier, E.2    Arnold, D.3
  • 16
    • 0000635723 scopus 로고
    • Theory of High-Field Electron Transport and Impact Ionization in Silicon Dioxide
    • Arnold, D., Cartier, E., and DiMaria, D.J., Theory of High-Field Electron Transport and Impact Ionization in Silicon Dioxide, Phys. Rev. B, 1994, vol. 49, no. 15, pp. 10278-10297.
    • (1994) Phys. Rev. B , vol.49 , Issue.15 , pp. 10278-10297
    • Arnold, D.1    Cartier, E.2    DiMaria, D.J.3
  • 17
    • 0012717733 scopus 로고
    • Interface States Induced by the Presence of Trapped Holes Near the Silicon-Silicon Dioxide Interface
    • DiMaria, D.J., Buchanan, D.A., Stathis, J.H., and Stahlbush, R.E., Interface States Induced by the Presence of Trapped Holes Near the Silicon-Silicon Dioxide Interface, J. Appl. Phys., 1995, vol. 77, no. 5, pp. 2032-2040.
    • (1995) J. Appl. Phys. , vol.77 , Issue.5 , pp. 2032-2040
    • DiMaria, D.J.1    Buchanan, D.A.2    Stathis, J.H.3    Stahlbush, R.E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.