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Volumn 39, Issue 3, 2000, Pages 398-401

Fabrication and characterization of diffractive optical elements in inp for monolithic integration with surface-emitting components

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EID: 0010579078     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.000398     Document Type: Article
Times cited : (9)

References (11)
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  • 2
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  • 3
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    • Integration of planar Fresnel microlenses with vertical-cavity surface-emitting laser arrays
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  • 4
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    • H. Martinsson, J. Bengtsson, M. Ghisoni, and A. Larsson, “Monolithic integration of vertical cavity surface emitting laser and diffractive optical element for advanced beam shaping,” IEEE Photonics Technol. Lett. 11, 503-505 (1999).
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  • 6
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    • (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4096-4099
    • Wendt, J.R.1    Vawter, G.A.2    Smith, R.E.3    Warren, M.E.4
  • 7
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    • Dry etching of InGaAsP/InP structures by reactive ion-beam etching using chlorine and argon
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    • W. Daschner, M Larsson, and S. H. Lee, “Fabrication of monolithic diffractive optical elements by the use of e-beam direct write on an analog resist and a single chemically assisted ion-beam-etching step,” Appl. Opt. 34, 2534-2539 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 2534-2539
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  • 9
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.