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Volumn 188, Issue 4, 2001, Pages 1331-1338
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Spectroscopic ellipsometry for characterization and monitoring of organic layers
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0010549092
PISSN: 00318965
EISSN: None
Source Type: Journal
DOI: 10.1002/1521-396X(200112)188:4<1331::AID-PSSA1331>3.0.CO;2-1 Document Type: Article |
Times cited : (6)
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References (21)
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