Interface traps in jet-vapor-deposited silicon nitride-silicon capacitors

Journal of Applied Physics

Volumn 79, Issue 11, 1996, Pages 8507-8511

  Mallik, A ^a   Wang, X W ^a   Ma, T P ^a   Cui, G J ^b   Tamagawa, T ^b   Halpern, B L ^b   Schmitt, J J ^b  

^a Yale University   (United States)

^b Jet Process Corp   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010499572     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362529     Document Type: Review

References (14)

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