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Volumn , Issue , 2000, Pages 80-81
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Practical interferometric solutions for increasing test coverage for high precision optical manufacturing
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Author keywords
[No Author keywords available]
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Indexed keywords
INTERFEROMETRY;
HIGH-PRECISION;
INTERFEROMETRICS;
LATERAL SHEAR;
MANUFACTURING FACILITY;
OPTICAL MANUFACTURING;
PRACTICAL METHOD;
SUBAPERTURE;
SURFACE COVERAGES;
TEST-COVERAGE;
MANUFACTURE;
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EID: 0010436690
PISSN: None
EISSN: 21622701
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (1)
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